发明名称 Chip package including a microphone structure and a method of manufacturing the same
摘要 In various embodiments, a method for manufacturing a chip package is provided. The method includes arranging a chip over a substrate, the chip including a microphone structure and an opening to the microphone structure; and encapsulating the chip with encapsulation material such that the opening is kept at least partially free from the encapsulation material.
申请公布号 US9290379(B2) 申请公布日期 2016.03.22
申请号 US201414446361 申请日期 2014.07.30
申请人 INFINEON TECHNOLOGIES AG 发明人 Theuss Horst
分类号 H01L27/00;B81C1/00;B81B3/00;H01L29/84;H04R1/08 主分类号 H01L27/00
代理机构 代理人
主权项 1. A method for manufacturing a chip package, the method comprising: arranging a chip over a substrate, the chip comprising a microphone structure and an opening to the microphone structure; and forming a spacer structure on the chip, wherein the spacer structure is formed around the opening to the microphone structure; encapsulating the chip with encapsulation material such that the opening is kept at least partially free from the encapsulation material, wherein during the chip encapsulation the spacer structure substantially prevents encapsulation material from entering the microphone structure.
地址 Neubiberg DE