| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe member for a pogo pin.SOLUTION: A probe member for a pogo pin used for the inspection of a semiconductor device has: at least a portion that is inserted into a cylindrical body and supported by an elastic member; and an upper end that is in contact with a terminal of a semiconductor device. The probe member includes: a probe part whose upper end is provided with multiple probes being in contact with the terminal of the semiconductor; and a connection part that is extended downward from the probe part, inserted into the cylindrical body, and connected to the cylindrical body. The probes are arranged in the center, and include: a first probe being in contact with the terminal of the semiconductor; and a second probe arranged adjacent to the first probe and provided with a guide face to guide the contacting terminal of the semiconductor device toward the first probe.SELECTED DRAWING: Figure 6 |
