Molecular glass of spirofluorene derivative, preparation method thereof and use thereof in photo-etching

摘要

Disclosed is a molecular glass of a spirofluorene derivative having a molecular structure as follows: formula (I),;
wherein each of R1-R12 is a hydrogen atom, a hydroxyl group, a methoxyl group or an acid-sensitive substituent; substituents R1˜R12 can be identical or different, but on the same benzene ring the substituents cannot all be hydrogen atoms. The molecular glass has a good solubility in various polar solvents, is suitable to be made into a film; meanwhile the molecular glass has a very high glass transition temperature and meets the requirements of the photolithography processing technology. Also disclosed is a preparation method of the above-mentioned molecular glass of a spirofluorene derivative. The synthetic process of the method is simple and suitable for industrialization. Further disclosed is the use of a photo-resist with the above-mentioned molecular glass as a main material in photo-etching, wherein the molecular glass of a spirofluorene derivative with hydroxyl groups (or partly with hydroxyl groups) on the periphery thereof can be used as a negative photo-resist, and the molecular glass with the hydroxyl groups on the periphery thereof protected (or partly protected) by an acid-sensitive substituent can be used as a positive photo-resist.

主权项

1. A spirofluorene derivative molecular glass, having the following molecular structure: wherein: substituents R1-R12 are a hydrogen atom, a hydroxyl group, a methoxyl group or an acid sensitive substituent, respectively; substituents R1-R12 can be same or different, but the substituents of a same benzene ring cannot all be hydrogen atoms.