Multigate resonant channel transistor

摘要

An embodiment includes an oscillator comprising an amplifier formed on a substrate; a multiple gate resonant channel array, formed on the substrate, including: (a) transistors including fins, each of the fins having a channel between source and drain nodes, coupled to common source and drain contacts; and (b) common first and second tri-gates coupled to each of the fins and located between the source and drain contacts; wherein the fins mechanically resonate at a first frequency when one of the first and second tri-gates is periodically activated to produce periodic downward forces on the fins. Other embodiments include a non planar transistor with a channel between the source and drain nodes and a tri-gate on the fin; wherein the fin mechanically resonates when the first tri-gate is periodically activated to produce periodic downward forces on the fin. Other embodiments are described herein.

主权项

1. A mechanical resonator apparatus comprising:
a nonplanar transistor including a fin that includes source and drain nodes, and a channel between the source and drain nodes; an additional source node included in the fin and an additional channel between the additional source node and the drain node; a first tri-gate, which is nonplanar, on the fin between the source and drain nodes; and first insulation included between the first tri-gate and the fin; a second tri-gate, which is nonplanar, on the fin between the source and drain nodes; and second insulation included between the second tri-gate and the fin; a third tri-gate, which is nonplanar, on the fin between the additional source node and the drain node; and a third insulation included between the third tri-gate and the fin; wherein at least a portion of the channel extends between the first and second tri-gates; wherein the fin mechanically resonates when the first tri-gate is periodically activated to produce periodic downward forces on the fin; wherein a mechanical resonator includes the source and drain nodes and an additional mechanical resonator, coupled to the mechanical resonator, includes the additional source node and the drain node.