Diffraction optical element and production method therefor

摘要

In a diffraction optical element having a structure in which a base and an optical adjustment layer adhere to each other, defects such as cracks and peeling occur in the optical adjustment layer, when the adhesive strength between the base and the optical adjustment layer is degraded. In a diffraction optical element 100 of the present invention, a plurality of anchor grooves 3 are formed in a planar second region 6 of a base 1. Further, a depth of an anchor groove of the plurality of anchor grooves 3, which is positioned on an outermost side, is designed so as to be smaller than a depth of another anchor groove of the plurality of anchor grooves 3, which is positioned on an innermost side. An optical adjustment layer 9 adheres so as to cover a first region 5 in which a diffraction grating 2 is formed and the second region 6 in which the anchor grooves 3 are formed of the base 1.

主权项

1. A diffraction optical element, comprising:
a base made of a first optical material containing a first resin, the base having a diffraction grating shape on a surface thereof; and an optical adjustment layer made of a second optical material containing a second resin, the optical adjustment layer being formed on the diffraction grating shape of the base, wherein the base includes a first region having the diffraction grating shape on a surface thereof, and a second region positioned outside the first region, wherein the optical adjustment layer is formed so as to cover the first region and at least a part of the second region, wherein the second region has a plurality of anchor grooves formed therein, wherein a part of a surface of the second region has a planar shape, and the anchor grooves have a recessed shape with respect to the planar shape, and wherein a depth of an anchor groove of the plurality of anchor grooves, which is positioned on an outermost side, is smaller than a depth of another anchor groove of the plurality of anchor grooves, which is positioned on an innermost side.