Passive wireless self-resonant sensor

摘要

A sensor for detecting one or more materials includes a substrate, a passivation layer formed on the substrate, a self-resonant structure and a high surface area material disposed on the passivation layer. The self-resonant structure includes a planar spiral inductor and a plurality of planar interdigitated capacitor electrodes disposed within the passivation layer. The planar spiral inductor includes an electrically conductive trace formed on the substrate in a planar spiral pattern having at least two turns and an inter-winding space between parallel segments of the electrically conductive trace. The plurality of planar interdigitated capacitor electrodes are electrically connected to the electrically conductive trace of the planar spiral inductor and formed on the substrate within the inter-winding space of at least one outermost turn of the planar spiral inductor. The high surface area material includes a conformal polymer coating to increase a sensitivity to the one or more materials.

主权项

1. A sensor for detecting one or more materials, the sensor comprising:
a substrate; a passivation layer formed on the substrate; a self-resonant structure comprising:
a planar spiral inductor disposed within the passivation layer, wherein the planar spiral inductor comprises an electrically conductive trace formed on the substrate in a planar spiral pattern having at least two turns and an inter-winding space between parallel segments of the electrically conductive trace, anda plurality of planar interdigitated capacitor electrodes disposed within the passivation layer, wherein the plurality of planar interdigitated capacitor electrodes are electrically connected to the electrically conductive trace of the planar spiral inductor and formed on the substrate within the inter-winding space of at least one outermost turn of the planar spiral inductor; and a high surface area material disposed on the passivation layer, wherein the high surface area material includes a conformal polymer coating to increase a sensitivity to the one or more materials.