发明名称 検出器デバイスおよびその製造方法、材料検査と特性解析のための装置および方法
摘要 A detector device is described comprising an x-ray detector structure having a detection surface defining at least one separately addressable region for detecting incident x-ray radiation intensity thereon, wherein the separately addressable region is divided into a plurality of sub-regions provided on the detection surface each provided with a filter layer on the detection surface, the filter layers of a given separately addressable region comprising discrete and different materials with discrete defined and spectroscopically spaced x-ray absorption edges. A method of device manufacture, and an apparatus and method for the inspection and characterization of materials employing such a detector device, are also described.
申请公布号 JP5890327(B2) 申请公布日期 2016.03.22
申请号 JP20120556589 申请日期 2011.03.11
申请人 クロメック リミテッド 发明人 バス アルナブ;ラドリー イアン;ロビンソン マックス
分类号 G01T7/00;G01T1/24;H01L31/08 主分类号 G01T7/00
代理机构 代理人
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