| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection using vertical illumination which does not depend on a kind of defects, the directional property of defect shapes, or the directional property of background patterns in an optical dark field defect inspection.SOLUTION: In the defect inspection, laser light emitted from a light source 101 is linearly collected, the linearly collected laser light is reflected by a mirror, the reflected laser light is radiated on a specimen mounted on a table via an object lens 102 from a perpendicular direction, the reflective scattering light from the specimen to which the laser light is radiated from the perpendicular direction is collected by the objective lens 102, diffraction light generated from the periodic pattern formed on the specimen and the scattering light generated from a mirror from among the reflective scattering light from the specimen collected by the objective lens 102 are shielded by a space filter, the reflective scattering light from the specimen which is not shielded by the space filter is made to enter an image formation lens 105 so as to form an image of the reflective scattering light, the image formed of the reflective scattering light is detected by a detector, and a detection signal obtained by detecting the image of the reflective scattering light by a detector 106 is processed so as to detect the defect on the specimen.SELECTED DRAWING: Figure 1 |
