| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device which can offer various different test modes to a test sample.SOLUTION: The light source device includes a first light source unit, at least one second light source unit, a spectroscopic unit appropriately moving to a first position and a second position, and an inspection unit. When the spectroscopic unit moves to the first position, the first light source unit emits a first light flux, the spectroscopic unit causes at least part of the first light flux to travel to the test sample, and the at least part of the first light flux is reflected by the test sample as first sample light flux traveling to the detection module. When the spectroscopic unit moves to the second position, the second light source unit emits the second light flux, the second light flux is emitted to the test sample, and the second light flux is reflected by the test sample as second sample light flux traveling to the detection module.SELECTED DRAWING: Figure 1 |
