OPTICAL CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a high performance optical circuit having simple manufacturing process.SOLUTION: An optical circuit 10 includes: a support substrate 100 having a tilt structure 121; an under clad layer 101 formed on the support substrate; a core layer 102 that is formed on the under clad layer 101 and has a grating coupler 111; and an overclad layer 103 formed on the core layer. The under clad layer 101 is not in contact with the support substrate 100 in the lower part of the grating coupler 111. The tilt structure 121 is formed in the lower part of the grating coupler 111.SELECTED DRAWING: Figure 1