| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid proportional valve capable of stabilizing a flow rate of fluid at the time of low flow rate by restricting a swing of a valve shaft of a valving element.SOLUTION: An elastic body 30 for biasing a valving element 50 is installed at the side opposite to a diaphragm 40 in respect to the valving element 50 in order to push the valving element 50 supported at the diaphragm 40 through a valve shaft 52 against a valve seat 38. An elastic body 60 having a part far from the valving element 50 rather than a part near the valving element 50 exhibits a low rigidity toward a direction orthogonal to the valve shaft 52. As one end side of the elastic body 60 near the valving element 50 is displaced along with a swinging of the valve shaft 52, the one end side is not deformed, but the another end is easily deformed. A slight displacement at the one end side of the elastic body 60 is transmitted to the another end side spaced apart from the one end side in respect to a fulcrum point of swing of the valve shaft 52, thereby the another end side is widely deformed and a motion of the another end side returned by its resilience is transmitted to enable the one end side to be precisely returned to a position before its displacement and a slight swing of the valve shaft 52 can be restricted with a high precision. |
