发明名称 Semiconductor chip and method of manufacturing the same
摘要 A chip includes a substrate and a dielectric layer disposed on the substrate. The dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region. A top surface of the first dielectric region is disposed below a top surface of the second dielectric region. The chip further includes a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate.
申请公布号 US9293430(B2) 申请公布日期 2016.03.22
申请号 US201514717606 申请日期 2015.05.20
申请人 Semiconductor Manufacturing International (Shanghai) Corporation 发明人 Chen Fucheng
分类号 H01L23/52;H01L23/00 主分类号 H01L23/52
代理机构 Innovation Counsel LLP 代理人 Innovation Counsel LLP
主权项 1. A chip comprising: a substrate; a dielectric layer disposed on the substrate, wherein the dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region, and wherein a top surface of the first dielectric region is disposed below a top surface of the second dielectric region; and a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate.
地址 CN