发明名称 |
Semiconductor chip and method of manufacturing the same |
摘要 |
A chip includes a substrate and a dielectric layer disposed on the substrate. The dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region. A top surface of the first dielectric region is disposed below a top surface of the second dielectric region. The chip further includes a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate. |
申请公布号 |
US9293430(B2) |
申请公布日期 |
2016.03.22 |
申请号 |
US201514717606 |
申请日期 |
2015.05.20 |
申请人 |
Semiconductor Manufacturing International (Shanghai) Corporation |
发明人 |
Chen Fucheng |
分类号 |
H01L23/52;H01L23/00 |
主分类号 |
H01L23/52 |
代理机构 |
Innovation Counsel LLP |
代理人 |
Innovation Counsel LLP |
主权项 |
1. A chip comprising:
a substrate; a dielectric layer disposed on the substrate, wherein the dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region, and wherein a top surface of the first dielectric region is disposed below a top surface of the second dielectric region; and a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate. |
地址 |
CN |