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发明名称
LIGHTING DEVICE FOR PARALLEL RAYS
摘要
본 발명은 평행광 조명장치를 개시한다. 본 발명에 따르면, 수㎛ 단위 미세 선폭의 노광공정 및 대면적 노광공정을 동시에 달성할 수 있는 조명장치를 제공할 수 있다.
申请公布号
KR101604586(B1)
申请公布日期
2016.03.22
申请号
KR20140075853
申请日期
2014.06.20
申请人
금호전기주식회사
发明人
김병현
分类号
F21V5/04
主分类号
F21V5/04
代理机构
代理人
主权项
地址
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