| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamination-type piezoelectric actuator and a manufacturing method of the lamination-type piezoelectric actuator, with which it is possible to reduce stress that occurs locally, prevent destruction, and achieve long life.SOLUTION: A lamination-type piezoelectric actuator is produced by alternately laminating piezoelectric ceramic layers and internal electrodes 12a connected to external electrodes 13a, wherein density of piezoelectric ceramic in proximity to outer peripheral parts 11a of the internal electrodes 12a is smaller than that of piezoelectric ceramic in proximity to central parts of the internal electrodes 12a. As a result, it becomes possible to reduce density in the vicinity of boundary parts between piezoelectric active parts and piezoelectric inactive parts, reduce displacement amounts of the parts at the time of operation, and reduce stress occurring in the vicinity of the boundary parts. Also, a crack is hard to progress in the low-density parts, so it becomes possible to prevent destruction of the piezoelectric actuator and achieve long life thereof. |
