Spatial light modulator, exposure apparatus, and method for manufacturing device

摘要

A spatial light modulator has a plurality of mirror elements each of which is controllable into a first state in which the mirror element reflects incident light with a change in a phase thereof by a first phase and a second state in which the mirror element reflects the incident light with a change in the phase thereof by a second phase 180° different from the first phase; and a boundary portion arranged between the mirror elements, which changes the phase of the incident light by a third phase substantially (90°+k·180°) (where k is an integer) different from the first phase. In projecting a pattern with the use of the spatial light modulator, an error caused in the pattern can be reduced even if the light quantity of light passing a gap region between the optical elements in the spatial light modulator is large.

主权项

1. A spatial light modulator that modulates incident light and emits the modulated light, the spatial light modulator comprising:
a plurality of reflective elements that have reflective surfaces situated to reflect the incident light, each reflective surface being able to change at least one of position and inclination; a first portion situated to reflect light incident to a gap between the reflective surfaces of adjacent reflective elements, and a second portion that reflects light incident to the gap, wherein the first portion and the second portion are situated at the gap between the adjacent reflective elements so that a predetermined phase difference is set between light reflected by the first portion and the second portion.