发明名称 MEASURING DEVICE, MEASURING METHOD, AND PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measuring device advantageous in terms of measurement precision.SOLUTION: A measuring device 40 measures a position of an object on the basis of output from a sensor 60, and has a first signal processing unit 33 which converts an analog signal output by the sensor 60 into a digital signal dig in response to a trigger signal trig, and outputs the digital signal dig, and a second signal processing unit 34 which outputs the trigger signal trig to the first signal processing unit 33 in response to a measurement request signal req_w2e, and receives the digital signal dig output from the first signal processing unit 33 in response to the trigger signal trig. The second signal processing unit 34 outputs the trigger signal trig to the first signal processing unit 33 ahead of the measurement request signal req_w2e by a difference between a timing of the trigger signal trig and the timing of the digital signal dig converted from the analog signal and output by the first signal processing unit 33 in response to the trigger signal trig.SELECTED DRAWING: Figure 5
申请公布号 JP2016038347(A) 申请公布日期 2016.03.22
申请号 JP20140163292 申请日期 2014.08.11
申请人 CANON INC 发明人 NAGAO YOSHITAKA
分类号 G01D5/12 主分类号 G01D5/12
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