发明名称 ダイシング装置及びダイシング方法
摘要 To stably perform cutting process even on a workpiece formed from a brittle material, in a ductile mode with high precision, without causing cracking and/or breaking in the workpiece. A dicing device (10) which performs cutting process on a workpiece (W) includes: a dicing blade (26) that is formed into a discoid shape from a diamond sintered body (80) formed by sintering diamond abrasive grains, and contains 80 % or more of the diamond abrasive grains; a spindle (rotating mechanism) (28) configured to rotate the dicing blade (26); and a movement mechanism configured to move the workpiece (W) relatively to the dicing blade (26) while forming a constant cut depth on the workpiece (W) by the dicing blade (26).
申请公布号 JP5888827(B2) 申请公布日期 2016.03.22
申请号 JP20150096460 申请日期 2015.05.11
申请人 株式会社東京精密;渡邉 純二 发明人 藤田 隆;渡邉 純二
分类号 H01L21/301;B24B27/06;B24D3/00;B24D5/12 主分类号 H01L21/301
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