| 发明名称 | Laser crystallization apparatus and method | ||
| 摘要 | A laser crystallization apparatus includes a laser generator that generates a laser beam, a stage mounted with an object substrate with an object thin film to which the laser beam is firstly incident, the stage is relatively movable such that the laser beam scans the object thin film for crystallization, and a reflection mirror that secondly reflects a second reflection laser beam to the object thin film from a first reflection laser beam that is reflected from the object thin film to the reflection mirror. | ||
| 申请公布号 | US9293567(B2) | 申请公布日期 | 2016.03.22 |
| 申请号 | US201313828242 | 申请日期 | 2013.03.14 |
| 申请人 | SAMSUNG DISPLAY CO., LTD. | 发明人 | Kim Sung-Ho;Choi Min-Hwan |
| 分类号 | C30B1/04;H01L29/66;H01L21/02;H01L27/12;B23K26/06;B23K26/08 | 主分类号 | C30B1/04 |
| 代理机构 | Lee & Morse, P.C. | 代理人 | Lee & Morse, P.C. |
| 主权项 | 1. A laser crystallization apparatus, comprising: a laser generator that generates a laser beam; a stage mounted with an object substrate with an object thin film to which the laser beam is firstly incident, the stage being relatively movable such that the laser beam scans the object thin film for crystallization; and a reflection mirror that secondly reflects a second reflection laser beam to the object thin film from a first reflection laser beam that is reflected from the object thin film to the reflection mirror. | ||
| 地址 | Yongin, Gyeonggi-Do KR | ||