发明名称 |
METHOD FOR FABRICATING WAFER STRUCTURE HAVING LATERAL JUNCTION |
摘要 |
The present invention relates to a method for fabricating a wafer structure having a lateral junction to improve process reproducibility. The method includes a step of forming the wafer structure on a first substrate; a step of cutting the wafer structure and forming a plate-shaped vertical wafer structure; and a step of transferring the vertical wafer structure to the plane of a second substrate. In the transfer step, the vertical wafer structure is transferred to a lateral wafer structure on the plane of the second substrate. The method can improve mechanical stability and reduce the generation of errors in processes. |
申请公布号 |
KR101605655(B1) |
申请公布日期 |
2016.03.22 |
申请号 |
KR20150052990 |
申请日期 |
2015.04.15 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
CHO, YONG HOON;KIM, SE JEONG |
分类号 |
H01L33/00;H01L33/04 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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