发明名称 ブロックコポリマー含有組成物及びパターンの縮小方法
摘要 The present invention relates to a composition including: a component (A) being a block copolymer including a block PA bonded to one, or two or more blocks incompatible with the block PA and whose etching selectivity to the block PA is greater than one; and a component (B) being at least one polymer selected from the group consisting of a random copolymer and a homopolymer, wherein the polymer of the component (B) is compatible with at least one block other than the block PA within the blocks constituting the block copolymer of the component (A), and is incompatible with the block PA.
申请公布号 JP5891075(B2) 申请公布日期 2016.03.22
申请号 JP20120052009 申请日期 2012.03.08
申请人 東京応化工業株式会社 发明人 先崎 尊博;宮城 賢;宮下 健一郎
分类号 H01L21/027;B82Y40/00;C08F20/00;C08L33/00;C08L53/00;G03F7/40 主分类号 H01L21/027
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