| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of determining the position of an edge of a specimen highly accurately by reflection illumination, and to provide a manufacturing method.SOLUTION: Information of a temporary position of an edge of a specimen is acquired, and an illumination area is set on a surface on one side of the temporary position by using the temporary position as a boundary. Then, an image of the specimen is acquired in an illumination state for illuminating a surface of the specimen in the defocused state from a focal position in an imaging optical system, and the position of the edge of the specimen is determined from the acquired image.SELECTED DRAWING: Figure 5 |
