发明名称 |
METHOD OF FORMING THIN FILM AND DISPLAY APPARATUS THEREFROM |
摘要 |
The present invention relates to a method for forming a thin film and a display device. The method for forming a thin film can manufacture a thin film with good quality while reducing a manufacturing time. According to the present invention, the method for forming a thin film on an object includes: a first mode forming a first thin film by using chemical vapor deposition using plasma and a laser; and a second mode forming a second thin film by using the chemical vapor deposition using plasma. |
申请公布号 |
KR20160030845(A) |
申请公布日期 |
2016.03.21 |
申请号 |
KR20150120450 |
申请日期 |
2015.08.26 |
申请人 |
RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY |
发明人 |
YEOM, GEUN YOUNG;KIM, KYONG NAM |
分类号 |
H01L21/02;H01L21/268;H01L27/32;H01L51/00;H01L51/52 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|