发明名称 METHOD OF FORMING THIN FILM AND DISPLAY APPARATUS THEREFROM
摘要 The present invention relates to a method for forming a thin film and a display device. The method for forming a thin film can manufacture a thin film with good quality while reducing a manufacturing time. According to the present invention, the method for forming a thin film on an object includes: a first mode forming a first thin film by using chemical vapor deposition using plasma and a laser; and a second mode forming a second thin film by using the chemical vapor deposition using plasma.
申请公布号 KR20160030845(A) 申请公布日期 2016.03.21
申请号 KR20150120450 申请日期 2015.08.26
申请人 RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY 发明人 YEOM, GEUN YOUNG;KIM, KYONG NAM
分类号 H01L21/02;H01L21/268;H01L27/32;H01L51/00;H01L51/52 主分类号 H01L21/02
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