发明名称 RESIST STRIPPER COMPOSITION
摘要 The present invention relates to a resist stripper composition. More specifically, the present invention relates to a resist stripper composition which minimizes corrosion of metal wires in a stripping process, exhibits excellent resist removing ability, and prevents formation of stains on a substrate. The present invention relates to a method for stripping the resist using the same. To this end, the resist stripper composition comprises: a glycol ether compound (A) represented by chemical formula 1; a compound (B) represented by chemical formula 2; an alkali-based compound (C); primary alcohols (D); and a polar aprotic solvent (E).
申请公布号 KR20160030835(A) 申请公布日期 2016.03.21
申请号 KR20150095668 申请日期 2015.07.06
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 LEE, YU JIN;KO, KYUNG JUN;KIM, JEONG HYUN;KIM, SUNG SIK
分类号 G03F7/42;H01L21/311 主分类号 G03F7/42
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