发明名称 |
RESIST STRIPPER COMPOSITION |
摘要 |
The present invention relates to a resist stripper composition. More specifically, the present invention relates to a resist stripper composition which minimizes corrosion of metal wires in a stripping process, exhibits excellent resist removing ability, and prevents formation of stains on a substrate. The present invention relates to a method for stripping the resist using the same. To this end, the resist stripper composition comprises: a glycol ether compound (A) represented by chemical formula 1; a compound (B) represented by chemical formula 2; an alkali-based compound (C); primary alcohols (D); and a polar aprotic solvent (E). |
申请公布号 |
KR20160030835(A) |
申请公布日期 |
2016.03.21 |
申请号 |
KR20150095668 |
申请日期 |
2015.07.06 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
LEE, YU JIN;KO, KYUNG JUN;KIM, JEONG HYUN;KIM, SUNG SIK |
分类号 |
G03F7/42;H01L21/311 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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