发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 The present invention provides a thin film transistor, which reduces contact resistance of a source electrode or a drain electrode, and a manufacturing method for the same, wherein the transistor uses an oxide semiconductor layer containing indium (In), gallium (Ga), and zinc (Zn). A buffer layer with higher carrier concentration than an IGZO semiconductor layer is formed on purpose between a source electrode layer, a drain electrode layer, and the IGZO semiconductor layer. Therefore, ohmic contact is formed.
申请公布号 KR20160030912(A) 申请公布日期 2016.03.21
申请号 KR20160025146 申请日期 2016.03.02
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;MIYAIRI HIDEKAZU;MIYANAGA AKIHARU;AKIMOTO KENGO;SHIRAISHI KOJIRO
分类号 H01L29/786 主分类号 H01L29/786
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