| 摘要 |
The present invention relates to a heater block comprising a base block connected with a heater inside thereof and heating a substrate, and a process processing unit connected with the base block by a pipe. The pipe comprises: a first pipe connected with the process processing unit; a second pipe connected with the base block; and a connection member connecting the first pipe and the second pipe. The connection member comprises a male member positioned to cover an outer circumference of the second pipe, and having a smaller inner diameter than a diameter of a protrusion formed in an end terminal of the second pipe; and a female member communicating the first pipe to the second pipe by coupling to the male member. The male member comprises a head part and a screw part, and the male member comprises a first male member and a second male member separable in longitudinal direction. The second male member comprises a protrusion formed in the head part, and the first male member comprises a groove that the protrusion is inserted thereto. The first male member comprises a protrusion unit formed protruded at the screw part, the second male member comprises an accommodating part that the protrusion unit is inserted thereto, and the male member is detachable in longitudinal direction. Through the present invention, a leak phenomenon occurred from a process of welding the pipe to the base block may be minimized by an electrical beam illuminated in a vertical upward direction to the base block. |
