| 摘要 |
The present invention relates to a bracket comprising an electrically conductive polarised table (10) which is connected to a high-voltage power supply (12) supported by an electrically insulating base (40), an electrically insulating substrate holder (20) which is cylindrical, the upper face thereof having a support plane for receiving a substrate (50), feet (15) which rest on the polarised table (10) in order to support the lower face of the substrate holder (20), at least one electrically conductive connection (201, 202, 203, 31, 30) for connecting the support plane to the polarised table (10). The bracket is characterized in that the substrate holder (20) incorporates a heating resistor (26). |
