| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus capable of vacuum-exhausting the inside of a vacuum chamber from the atmospheric pressure even in the state that a leak place exists.SOLUTION: A vacuum processing apparatus VM comprises: a vacuum chamber 1; a vacuum pump 3 for vacuum-exhausting the inside of the chamber from the atmospheric pressure; and blocking means 22 for blocking an opening 11 provided in the wall surface portion of the vacuum chamber stood against an installation surface to airtightly hold the inside of the vacuum chamber. A method for vacuum-exhausting the vacuum processing apparatus comprises: connecting the vacuum chamber and the vacuum pump with an exhaust pipe 51 having an interposed opening/closing valve 41 and having a predetermined length; operating the vacuum pump in the state of closing the opening/closing valve to vacuum-exhaust a portion 51a of the exhaust pipe positioned between the opening/closing valve and the vacuum pump; and opening the opening/closing valve to vacuum-exhaust the vacuum chamber from the atmospheric pressure.SELECTED DRAWING: Figure 2 |
