发明名称 NONVOLATILE MEMORY DEVICE
摘要 A nonvolatile memory device includes a memory cell array and a peripheral circuit. The peripheral circuit is connected to the memory cell array through conductive lines and includes transistors. Each of the transistors is formed on the substrate and includes first and second regions and a gate electrode. In at least one of the transistors, the first region is connected to at least one of the conductive lines through first contact plugs extending in the direction perpendicular to the substrate, and second contact plugs extending in the direction perpendicular to the substrate. A contact area of each of the first contact plugs is different from a contact area of each of the second contact plugs.
申请公布号 US2016079259(A1) 申请公布日期 2016.03.17
申请号 US201514678526 申请日期 2015.04.03
申请人 SON Jai-Ick;KIM SUNGHOON 发明人 SON Jai-Ick;KIM SUNGHOON
分类号 H01L27/115;H01L23/528;H01L23/535 主分类号 H01L27/115
代理机构 代理人
主权项 1. A nonvolatile memory device, comprising: a memory cell array including a plurality of cell strings, wherein each of the cell strings comprises memory cells stacked in a direction perpendicular to a substrate; and a peripheral circuit connected to the memory cell array through a plurality of conductive lines, wherein the peripheral circuit comprises a plurality of transistors, wherein each of the transistors is formed on the substrate, wherein each of the transistors includes first and second regions, wherein the first and second regions comprise a conductive material different from a material included in the substrate, and wherein a gate electrode is disposed between the first and second regions, wherein in at least one of the transistors, the first region is connected to at least one of the conductive lines through a plurality of first contact plugs extending in the direction perpendicular to the substrate, and a plurality of second contact plugs extending in the direction perpendicular to the substrate, wherein each of the second contact plugs is disposed on a respective first contact plug, and wherein a contact area of each of the first contact plugs is different from a contact area of each of the second contact plugs.
地址 Gyeonggi-do KR
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