| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method that can efficiently perform an inspection in a short time when the electrical characteristics of plural devices are inspected.SOLUTION: A signal input/output circuit 33 has an input line 41, a common output line 51, a plurality of individual output lines 52, a relay switch unit 53, and a resistance element 54. The common output line 51 for combining and transmitting response signals from plural DUTs 10 is connected to a comparator 32. In response to a test signal transmitted from a pattern generator 31, the comparator 32 compares a threshold value with a composite response signal obtained by combining response signals output from the plural DUTs 10 into one signal.SELECTED DRAWING: Figure 2 |
