发明名称 PHOTODETECTOR WITH PLASMONIC STRUCTURE AND METHOD FOR FABRICATING THE SAME
摘要 A photodetector with a plasmon structure includes a semiconductor substrate, a plurality of light-receiving elements that are formed in a predetermined pattern, protruding from the semiconductor substrate, and a nanostructure that is placed in contact with a surface of the semiconductor substrate among the light-receiving elements and which induces a plasmon phenomenon thereon.
申请公布号 US2016079452(A1) 申请公布日期 2016.03.17
申请号 US201414562357 申请日期 2014.12.05
申请人 AGENCY FOR DEFENSE DEVELOPMENT 发明人 SEOK Chulkyun;YOON Euijoon;PARK Yongjo;KIM Chiyeon
分类号 H01L31/0236;H01L31/18;H01L27/144 主分类号 H01L31/0236
代理机构 代理人
主权项 1. A photodetector with a plasmon structure, comprising: a semiconductor substrate; a plurality of light-receiving elements that are formed in a predetermined pattern, protruding from the semiconductor substrate; and a nanostructure that is placed in contact with a surface of the semiconductor substrate among the light-receiving elements and which induces a plasmon phenomenon thereon.
地址 Daejeon KR