ANISOTROPIC CONDUCTOR FILM AND MANUFACTURING METHOD THEREOF, DEVICE, ELECTRON-EMISSION ELEMENT, FIELD EMISSION LAMP, AND FIELD EMISSION DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide an anisotropic conductor film which enables the increase in endurance when used for an FE device and the like even if there is a remaining gas in vacuum or an adsorbate such as a water content on a leading end of a conductor formed in a through-hole.SOLUTION: An anisotropic conductor film 1 comprises: a pore structure 21 including an anode oxide metal film having through-holes 21H; and conductors 22 selectively formed in part of the through-holes 21H. In the anisotropic conductor film 1, an unsealed hole part NSA is at least partially removed; and each conductor 22 has a head top protruding from the pore structure 21. In the conductor 22, a part 22T including the head top has, as a primary component, at least one selected from a group consisting of a conductive metal oxide, a conductive metal nitride, a conductive metal oxynitride, and a conductive metal carbide; another part 22M includes at least one metal as a primary component; and a metal element included in the part 22T is the same as a metal element included in another part 22M.SELECTED DRAWING: Figure 1A