ELECTRON MICROSCOPE STAGE WITH 6-AXIS MOVEMENT USING SEM STAGE

摘要

The present invention relates to an electron microscope stage with 6-axis movement used for not only an SEM but also a TEM or STEM by using an existing SEM sample stage in an electron microscope. More particularly, the present invention relates to an electron microscope stage with 6-axis movement which includes a sample holding part. The sample holding part includes simple cradles which have one or more grid mounting groove-beam penetration hole, and a support plate for mounting the sample cradles. The sample holding part is erected at a preset angle from the upper surface of the SEM or STEM sample stage.