| 摘要 |
PROBLEM TO BE SOLVED: To increase a capacitance of a capacitor to stabilize power supply characteristics, in a semiconductor device that has such a configuration that a plurality of semiconductor chips are laminated.SOLUTION: A semiconductor device comprises: a semiconductor substrate that has a first conductivity type; a via that penetrates through the semiconductor substrate; a first conductive layer that has a second conductivity type opposite to the first conductivity type, and provided so as to be contacted with the semiconductor substrate in the via; and a second conductive layer provided so as to embed the via through a first insulating layer contacted with the first conductive layer in the via.SELECTED DRAWING: Figure 4 |
