SILICON INTERFACE FOR DIELECTRIC SLAB WAVEGUIDE

摘要

The present disclosure relates to an integrated chip having coupling elements that couple electromagnetic radiation having a frequency outside of the visible spectrum between a silicon substrate and a dielectric waveguide overlying the silicon substrate. In some embodiments, the integrated chip has a dielectric waveguide disposed within an inter-level dielectric (ILD) material overlying a semiconductor substrate. A first coupling element couples a first electrical signal generated by a driver circuit disposed within the semiconductor substrate to a first end of the dielectric waveguide as electromagnetic radiation having a frequency outside of the visible spectrum. A second coupling element couples the electromagnetic radiation from a second end of the dielectric waveguide to a second electrical signal. By coupling electromagnetic radiation having a frequency outside of the visible spectrum to and from the dielectric waveguide, the disclosed integrated chip is able to overcome a number of drawbacks of optical integrated waveguides.

主权项

1. An integrated chip, comprising:
an inter-level dielectric (ILD) material disposed over a semiconductor substrate; a dielectric waveguide disposed within the ILD material and having a permittivity higher than the ILD material; a first coupling element configured to couple a first electrical signal generated by a driver circuit disposed within the semiconductor substrate to a first end of the dielectric waveguide as electromagnetic radiation having a frequency that is outside of the visible spectrum of light; and a second coupling element configured to couple the electromagnetic radiation from a second end of the dielectric waveguide to a second electrical signal.