| 发明名称 |
Particle Supply Device and Particle Supply Method |
| 摘要 |
A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing. |
| 申请公布号 |
US2016074821(A1) |
申请公布日期 |
2016.03.17 |
| 申请号 |
US201514636349 |
申请日期 |
2015.03.03 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
HIRANO Masaki;KURODA Yuichi |
| 分类号 |
B01F15/04;B01F15/02 |
主分类号 |
B01F15/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A particle supply device comprising:
a housing to seal a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device; and a particle supplier to supply particles to an inside of the housing. |
| 地址 |
Tokyo JP |
