发明名称 |
Sacrificial Carrier Dicing of Semiconductor Wafers |
摘要 |
Mechanisms are provided for sacrificial carrier dicing of semiconductor wafers. A bottom layer of a semiconductor wafer is bonded to a top layer of a sacrificial carrier. The semiconductor wafer is diced into a set of chips, such that the dicing cuts through the semiconductor wafer and into the sacrificial carrier and such that the sacrificial carrier dresses a diamond blade of a saw so as to expose one or more new, sharp layers of diamonds on the diamond blade. |
申请公布号 |
US2016079117(A1) |
申请公布日期 |
2016.03.17 |
申请号 |
US201414488496 |
申请日期 |
2014.09.17 |
申请人 |
International Business Machines Corporation |
发明人 |
Graf Richard S.;Powell Douglas O.;Russell David J.;West David J. |
分类号 |
H01L21/78;H01L23/544;H01L21/683;H01L21/67;H01L21/304;H01L21/268 |
主分类号 |
H01L21/78 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
Armonk NY US |