发明名称 Sacrificial Carrier Dicing of Semiconductor Wafers
摘要 Mechanisms are provided for sacrificial carrier dicing of semiconductor wafers. A bottom layer of a semiconductor wafer is bonded to a top layer of a sacrificial carrier. The semiconductor wafer is diced into a set of chips, such that the dicing cuts through the semiconductor wafer and into the sacrificial carrier and such that the sacrificial carrier dresses a diamond blade of a saw so as to expose one or more new, sharp layers of diamonds on the diamond blade.
申请公布号 US2016079117(A1) 申请公布日期 2016.03.17
申请号 US201414488496 申请日期 2014.09.17
申请人 International Business Machines Corporation 发明人 Graf Richard S.;Powell Douglas O.;Russell David J.;West David J.
分类号 H01L21/78;H01L23/544;H01L21/683;H01L21/67;H01L21/304;H01L21/268 主分类号 H01L21/78
代理机构 代理人
主权项
地址 Armonk NY US