| 发明名称 |
AutoSlice and View Undercut Method |
| 摘要 |
A method is provided for slice and view processing of samples with dual beam systems. The slice and view processing includes providing a location for particles and material resulting from the slice and view process to collect without obscuring the sample face to be viewed and imaged. This location is formed as an undercut located beneath or in front of the sample face. |
| 申请公布号 |
US2016079035(A1) |
申请公布日期 |
2016.03.17 |
| 申请号 |
US201414484025 |
申请日期 |
2014.09.11 |
| 申请人 |
FEI Company |
发明人 |
Passey Richard Glen Ivy;McNeil John C. |
| 分类号 |
H01J37/317;H01J37/22 |
主分类号 |
H01J37/317 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of processing a sample by slice and view processing with a dual beam system, comprising:
locating an area of interest in the sample for viewing and imaging; exposing a face in the sample by removing material to create a trench; isolating the area of interest by removing material to form side trenches on each side of the area of interest; and creating a location for collecting particles resulting from the slice and view processing without obscuring the sample face. |
| 地址 |
Hillsboro OR US |
