| 摘要 |
A system for measurement of workpiece surface topography includes: a sensor; a motion system, configured to move the sensor or a workpiece in x-, y-, and z-directions; and an applicator, configured to provide displacement of coolant away from a measurement point or multiple measurement points on the workpiece, wherein the displacement of the coolant provides the sensor with access to the measurement point (s). The sensor is configured to obtain a measurement from the measurement point (s) on the workpiece during a machining process where the workpiece is under coolant condition based on the coolant being displaced away from the measurement point (s) by the applicator. |
