| 摘要 |
PROBLEM TO BE SOLVED: To realize a laser gas analysis device which, using a wavelength variable laser variable in a wide wavelength range as a laser light source, can measure hydrogen carbide whose spectral feature is small with high accuracy, as well as hydrogen carbide whose spectral feature is large, by using a statistical technique in which a sharp peak portion of methane is excluded in concentration detection.SOLUTION: The present invention provides a laser gas analysis device configured including a wavelength variable laser having a wide wavelength variable width, light irradiation means for irradiating gas to be measured with the output light of the wavelength variable laser as a measuring beam, and a data processing unit for finding the absorption spectrum of the gas to be measured on the basis of an absorption signal having passed through the gas to be measured and associated with the measuring beam and calculating the concentration of each component on the basis of a statistical technique. The laser gas analysis device is characterized in that the data processing unit uses, in finding the concentration of a gas component not having a sharp absorption peak, an absorption spectrum of a wavelength region in which a sharp absorption peak of other gas components is not present among absorption spectra obtained by sweeping a relatively wide wavelength range.SELECTED DRAWING: Figure 1 |
