发明名称 NONVOLATILE MEMORY ELEMENT AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention provides a nonvolatile memory element, in a nonvolatile memory element having a variable resistance layer possessing a stacked structure, in which the variable resistance layer has a high resistance change ratio, and a method of manufacturing the same. The nonvolatile memory element according to one embodiment of the present invention includes a first electrode, a second electrode, and a variable resistance layer which is interposed between the first electrode and second electrode and in which the resistance value changes into at least two different resistance states. The variable resistance layer possesses a stacked structure having a first metal oxide layer containing Hf and O, and a second metal oxide layer that is provided between the first metal oxide layer and at least one of the first electrode and the second electrode and contains Al and O.
申请公布号 US2016079530(A1) 申请公布日期 2016.03.17
申请号 US201514829897 申请日期 2015.08.19
申请人 CANON ANELVA CORPORATION 发明人 KIM Eun-mi;OTANI Yuichi;NAKAGAWA Takashi
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项
地址 Kawasaki-shi JP