发明名称 INDIVIDUAL PIECE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To simplify an individual piece manufacturing step including a step of mounting an individual piece on an object to be mounted without the need to re-hold a division surface side.SOLUTION: An individual piece manufacturing method comprises the steps of: preparing a wafer WF as a plate-like member (plate-like member preparing step); forming a groove 11 which does not penetrate a surface on the opposite side on both surfaces (one surface and the other surface) of the wafer WF (groove forming step); and forming a semiconductor chip CP as a plurality of individual pieces from the wafer WF by forming a notch 12 along one surface or the other surface from s side surface of the wafer WF (notch forming step).SELECTED DRAWING: Figure 4
申请公布号 JP2016035963(A) 申请公布日期 2016.03.17
申请号 JP20140158088 申请日期 2014.08.01
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/301;B23K26/53;B24B27/06;B28D1/22;B28D1/24 主分类号 H01L21/301
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