| 摘要 |
PROBLEM TO BE SOLVED: To provide a table device, a positioning device, and a precision machine, capable of suppressing the cost of manufacture, and of appropriately preventing reduction in life of a table caused by the weight of a mounted object.SOLUTION: A table device 1 comprises: a base 10; a pair of guide rails 31 provided so as to extend on a front surface 10a of the base 10; and a table 20 that includes a pair of sliders 32 installed slidably to the guide rails 31 on a rear face 20b, and linearly moves to the base 10. A stator 41 is provided on a rear face 10b of the base 10. The table 20 is provided with a supporting part 50 on which a movable element 42 is installed so that a direction of a magnetic attraction force to the stator 41 is against the gravity of a mounted object 90 installed on the table 20.SELECTED DRAWING: Figure 1 |
