CONTROLLER FOR TREATMENT OF SEMICONDUCTOR PROCESSING EQUIPMENT EFFLUENT

摘要

Embodiments disclosed herein include a controller for a treatment system for lessening the hazard of effluents produced in a processing system.

主权项

1. A controller, comprising:
a MCU for processing a program; a plurality of I/O ports configured to communicate with the MCU; an interlock logic in communication with the MCU, wherein the interlock logic provides a run state for the MCU; memory, where the memory comprises:
recipe memory storing a plurality of programs; andlog memory; and wherein the MCU is configured to execute a selected one of the plurality of programs upon the interlock logic providing a run state.