EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE

摘要

There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.

主权项

1. An evaluation system, comprising:
a solid immersion lens; a plurality of spatial sensors, each spatial sensor in the plurality of spatial sensors being arranged to generate spatial relationship information indicative of a spatial relationship between the solid immersion lens and a substrate, wherein the plurality of spatial sensors comprises multiple atomic force microscopes (AFMs); at least one location correction element; a controller arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate; and a supporting structure coupled to the spatial sensors, the solid immersion lens and the at least one location correction element.