申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;SHIN-ETSU CHEMICAL CO., LTD;IBM UNITED KINGDOM LIMITED;IBM JAPAN LIMITED |
发明人 |
SOORIYAKUMARAN, RATNAM;SUNDBERG, LINDA, KARIN;SANCHEZ, MARTHA, INEZ;BOZANO, LUISA, DOMINICA;SANDERS, DANIEL, PAUL;WATANABE, SATOSHI;MASUNAGA, KEIICHI;DOMON, DAISUKE;KAWAI, YOSHIO |