INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS

摘要

An integrated MEMS and IC system (MEMSIC), as well as related methods, are described herein. According to some embodiments, a mechanical resonating structure is coupled to an electrical circuit (e.g., field-effect transistor). For example, the mechanical resonating structure may be coupled to a gate of a transistor. In some cases, the mechanical resonating structure and electrical circuit may be fabricated on the same substrate (e.g., Silicon (Si) and/or Silicon-on-Insulator (SOI)) and may be proximate to one another.

主权项

1. An integrated circuit, comprising:
an electrical circuit; and a mechanical resonating structure having a resonating element including at least one dimension less than 100 microns, wherein the mechanical resonating structure is coupled to the electrical circuit and the mechanical resonating structure and the electrical circuit are integrated on a first substrate.