METHOD OF SIMULATING FORMATION OF LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS

摘要

A method of determining an uncertainty in the position of a domain within a self-assembly block copolymer (BCP) feature. The method includes simulating a BCP feature, calculating a minimum energy position of a first domain within the simulated BCP feature, simulating the application of a potential that causes the position of the first domain to be displaced from the minimum energy position, simulating release of the potential back toward the minimum energy, recording a plurality of energies of the BCP feature during the release and recording at each of the plurality of energies a displacement of the first domain from the minimum energy position, calculating, from the recorded energies and recorded displacements, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position, and, from the probability distribution, calculating an uncertainty in the position of the first domain within the BCP feature.

主权项

1. A method comprising:
simulating a self-assembly block copolymer feature, wherein the simulated block copolymer feature comprises a first domain comprising a first polymer type and a second domain comprising a second polymer type; calculating a minimum energy position of the first domain within the simulated block copolymer feature, wherein the minimum energy position is the position of the first domain at a first energy state of the block copolymer feature, the first energy state being substantially at a minimum energy; simulating the application of a potential to the block copolymer feature, wherein the potential causes the position of the first domain to be displaced from the minimum energy position; simulating release of the potential, thereby allowing the energy of the block copolymer feature to relax to substantially the minimum energy; recording a plurality of energies of the block copolymer feature as the block copolymer feature relaxes to substantially the minimum energy; recording at each of the plurality of energies a displacement of the first domain from the minimum energy position; calculating, from the recorded energies of the block copolymer feature and the recorded displacements of the first domain, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position; and calculating, from the probability distribution, an uncertainty in the position of the first domain within the block copolymer feature.