| 摘要 |
Provided is an electrification processing device C1 that charges an object PO to be processed to a desired potential. The electrification processing device C1 is equipped with: a processing portion 1 enclosing the object PO to be processed under a predetermined pressure atmosphere containing a charged particle formation gas; an electron source portion 3 disposed in the processing portion 1 and having an electron generation source for generating electrons; and a mesh-shaped electrode portion 30 disposed between the electron source portion 3 and the object PO to be processed. In the electron source portion 3, an accelerating electric field is formed that accelerates electrons generated in the electron generation source toward the electrode portion 30. The potential of the processing portion 1 and the electrode portion 30 is set as the desired potential. |
