发明名称 DEVICE AND SYSTEM FOR REDIRECTING AND MEASURING CATHODOLUMINESCENCE LIGHT IN A TRANSMISSION ELECTRON MICROSCOPE
摘要 The invention relates to a device for redirecting cathodoluminescence light during a cathodoluminescence light measurement in a transmission electron microscope having an objective lens with a gap (12). According to the invention, in order to be able to redirect the greatest possible amount of cathodoluminescence light being emitted from a sample to a detector, the device comprises a base body (6) and at least one upper deflection mirror (8) and at least one lower deflection mirror (8'), wherein the deflection mirrors (8, 8') are connected to the base body, and wherein the device is designed in such a way that, in an operating position of the device, the deflection mirrors (8, 8') can be arranged in the gap (12) in such a way that the respective deflection mirrors (8, 8') are arranged laterally in relation to the optical axis (11) and, along the optical axis (11), a sample holder (4) is arranged in a measuring position between the at least one upper deflection mirror (8) and the at least one lower deflection mirror (8'), wherein the deflection mirrors (8, 8') are designed in such a way that cathodoluminescence light being emitted from the sample (4) is reflected out of the gap (12) in a transverse manner in relation to an optical axis (11) of the objective lens or of the transmission electron microscope.
申请公布号 WO2016037198(A1) 申请公布日期 2016.03.17
申请号 WO2014AT50203 申请日期 2014.09.12
申请人 TECHNISCHE UNIVERSITÄT WIEN 发明人 STÖGER-POLLACH, MICHAEL;SCHACHINGER, THOMAS;LÖFFLER, STEFAN
分类号 H01J37/22;H01J37/26 主分类号 H01J37/22
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