A humidity sensor may include a first substrate having a recess formed in a first side, a second substrate and an insulating layer supported by the second substrate. The second substrate and the insulating layer may be supported by the first side of the first substrate and extend over the recess to form a diaphragm with the insulating layer facing the recess. The diaphragm may be at least partially thermally isolated from a remainder of the second substrate. A resistive heater element may be supported by the diaphragm. A pair of sensing electrodes are electrically separated from each other and supported by the diaphragm. A sensing material is disposed over the pair of sensing electrodes, wherein an electrical property of the sensing material changes in response to a change in moisture content of the sensing material.
